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ROBOT & ROBOT ARMATURE REBUILD SERVICE FOR THE MATTSON ASPEN II ASHER
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OEM Spares' parent company OEM Surplus began remanufacturing Mattson Aspen II Strip systems in 1999. From its inception, a trend was immediately noticed:
Robot & Robot Arm Assemblies degrade much quicker than many of the other subsystems on the platform.
Symptoms of degradation:
- Errors
- Pin search
- Rotation
- Extension time out
- Dropped or misplaced wafers
- Unable to find home position
- Excessive noise
OEM Spares launched the Robot Rebuild Service, a separate product line, created to focus specifically on refurbishing Robot & Arm Assemblies.
Program is designed to:
- Minimize tool downtime
- Increase lifespan of tool
- Improve equipment performance
- Lower overall cost of ownership
Program is designed for:
Mattson Aspen II
- ICP, ICPsm
- Lite Etch
- Diode Systems
- Triode Systems
- CVD
Rebuild Process Includes:
- Complete Teardown
- Initial Parts Inspection
- Parts Replacement
- Polish & Anodize (Arms Only)
- Reassembly
- Final Evaluation - Includes 150,000 cycles of continuous testing
Product Options:
ReNEW
- Remanufactured to “Like New” condition
- Shipment: 4 weeks after receipt of failed robot
Exchange
- Swap with refurbished unit
- Shipment: within 24 hours of PO receipt
Purchase
- Refurbished unit
- Shipment: within 24 hours of PO receipt
Note: All options include a 1-year warranty.
(Manufacturer warranty only 90-days!)
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